Plasma etching applications

Plasma etching applications

Plasma etchers can be used to show failure analysis

A form of plasma processing used to fabricate integrated circuits is called plasma etching. A high-speed stream of plasma discharge or glow with an appropriate mixture of gas being shot in pulses at a sample truly defines the plasma etching. Antoher technique to surface treat, is to use liquid etchers. However, this comes at a environmental cost, and is often a lot more costly. REad more about that in this article. The source of plasma known as etch species can be charged ions or atoms and radicals that are neutral. During the plasma process volatile etch products are generated at room temperature from the reactions of chemicals between the elements of the material etched and the reactive species that has generated the plasma. Furthermore, the atoms eventually embed themselves at or just below the surface of the target and this modifies the target’s physical properties. This is a very environmentally safe method. Read more