Plasma etching applications

Plasma etchers can be used to show failure analysis

A form of plasma processing used to fabricate integrated circuits is called plasma etching. A high-speed stream of plasma discharge or glow with an appropriate mixture of gas being shot in pulses at a sample truly defines the plasma etching. Analysis is performed in many different businesses and companies, for instance data analysis can be used to understand complex patterns.

However – Another technique to surface treat, is to use liquid etchers. However, this comes at a environmental cost, and is often a lot more costly.  The source of plasma known as etch species can be charged ions or atoms and radicals that are neutral. During the plasma process volatile etch products are generated at room temperature from the reactions of chemicals between the elements of the material etched and the reactive species that has generated the plasma. Furthermore, the atoms eventually embed themselves at or just below the surface of the target and this modifies the target’s physical properties. This is a very environmentally safe method.

Etching and cleaning metal
Etching and cleaning metal

A high energetic condition in which many processes may occur defines plasma. For plasma electrons to gain energy they must be accelerated. Collisions cause highly energetic electrons to transfer their energy to atoms.

There are three different processes that can occur because of collisions and they are:

1) Ionization,2) Excitation and 3) Dissociation.

There are different species that make up the plasma particles and they are:

1)Ions, 2) Electrons, 3)Neutral and 4) Radicals. These species are constantly interacting with each other.

A plasma etcher is an etching tool that is used to produce semiconductor devices. Plasma is produced from process gas by the etcher of plasma. The process gas is usually fluorine-bearing gas that uses a high frequency electric field or simple oxygen. Silicon wafers are placed in the plasma etcher and the process chamber evacuates the air using vacuum pumps. At a low pressure, the process gas is introduced and excites the plasma through dielectric breakdown. Delaying integrated circuits that use plasma etchers can show failure analysis in a system. This is also an environmentally safe method as well.

Industrial plasma etchers are often featured plasma confinement to enable etch rates that are repeated and precise spatial distribution in RF plasma. Debye sheath is just one method of confining the plasma. This method is a near-surface plasma layer similar to the double layer in other fluids. An example would be if the length of the Debye sheath is at least half the width of the slotted quartz, the sheath will close off the slot and the plasma will be confined. This procedure will still permit the particles that are uncharged to still pass through the slot.

One thought on “Plasma etching applications

  • December 12, 2020 at 6:45 am

    When you see visual damage, it’s already too late. At that point, the corrosion is set into the material it never goes away with usual coating solutions. To prevent further damage of your equipment, you can shield your equipment by Metaline surface coating which is known for protective industrial coating.


Leave a Reply

Your email address will not be published. Required fields are marked *